Adopt integrated drilling process.
Realize customized processing of any length.(3-14mm aperture)
High purity of raw materials.
High metal contamination control to meet the requirements of the silicon wafer treatment process.
Same coefficient of the thermal expansion.
The deposition thickness is up to 300μm, 10 times of that of quartz injectors.
Product Length | 100mm-1400mm |
Aperture Size | 4mm-12mm |
Product Structure | Welded, Integrated, Threaded Connection |
Conductive Type/Doping | Custom |
Resistivity | Low Resistance (E.G.<0.015, <0.02...). ; |
Moderate Resistance (E.G. 1-4); | |
High Resistance (E.G. 60-90); | |
Customer Customization | |
Material Type | Polycrystal/Single Crystal |
Silicon Injector is applied in the HT and deposition machine as the process gas channel. It's the critical component in the HT and deposition process.