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The Silicon Cassette Boat from DSTC is a specialized silicon-based product used in various semiconductor manufacturing processes. It is designed in the shape of a boat or tray to hold and transport silicon wafers during different stages of production. Silicon Cassette Boats ensure that wafers remain intact and uncontaminated during the manufacturing process.
Made from high-purity silicon, DSTC Silicon Boats as wafer cassette carriers offer excellent thermal stability and chemical resistance. These wafer cassettes are crucial for ensuring the safe handling and protection of delicate silicon wafers during processes like cleaning, etching, and deposition. Silicon Boats are precision-engineered to accommodate multiple wafers, providing efficient and uniform processing. With their high-quality construction and reliability, Sifusion Silicon Cassette Boats, play a vital role in the semiconductor industry, contributing to the production of high-performance electronic devices.
The material of DSTC silicon boat is high-purity silicon material without any surface deposition layer, and there will be no deformation and surface material fall-off problems after long-term using.
Assurance for no self-contamination in long-term using.
| Product Structure | Integrated |
| Resistivity | Low Resistance (E.G.<0015, <0.02...). ; |
| Moderate Resistance (E.G. 1-4); | |
| High Resistance (E.G. 60-90); | |
| Customer Customization | |
| Material Type | Polycrystal/Single Crystal |
| Operating Temperature | <1,250 ℃ |
| Thermal Expansion Coefficient | 3.8E-06/K(Same As Silicon Wafer) |
| Metal Contamination Residue | 1E10 atom /cm² |
| Rail Bar Angle | Customized |
| Rail Tooth Shape | Customized |
1. Self-developed cleaning technology. Has ultra-high surface cleanliness.
2. Providing the customized services.
3. Identical CTE：same material with wafer, no scratch and slip.
4. Ultra-high purity raw materials , purity up to 11N.
5. Repairability and long life up to 5 years.
The type of one-piece silicon boat, is mainly applied in 4 - 6 inch horizontal HT furnace (under 1250°C）
Leading provider of precision silicon components for the semiconductor industry, specializing in R&D, production, and sales.
Contact With Us:
E-mail: market@sifusion.com.cn
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No.23 Guangming West Road, Yinchuan Technological Econnmic Development Zone, Ningxia, China
